Technical notes 5 min read

SCAN-Lab Technical Notes 14: Height Tracking Inputs for SKP Investigations

Latest updated: August 4, 2021

Introduction

In this application note, the use of Height Tracking – Scanning Kevin Probe (HT-SKP) is investigated. When performing HT-SKP on the M370 or M470 the sample topography is obtained from one of three experiment types:

1. Capacitive Height Measurement (CHM)
2. Capacitive Tracking Measurement (CTM)
3. Non-contact Optical Surface Profiler (OSP)

CHM and CTM are both SKP based topography techniques and have been extensively compared in Scan-Lab AN#1. The methods for using these topography inputs will be outlined and the resulting measurements compared. Finally, guidelines for the topography input file used for a height tracking measurement will be given. While this application note focuses on SKP, many of the guidelines provided will be applicable to the other height tracking measurements available on Scan-Lab systems.

Related files

SCAN Lab TN14 Height Tracking Inputs for SKP Investigations

You cannot access this resource because you are not logged in. Log in

Related products

Work smarter. Not harder.

Tech-tips, theory, latest functionality, new products & more.

Subscribe to the newsletter

No thanks!