Intermittent Contact (ic) SECM for relief of major topographic features – Scanning Probes – Application Note 16

Abstract

Using ic-SECM the probe to sample distance can be maintained over large areas making it useful for not only removing the influence of sample tilt, but also for measuring samples with major topographic features for example curved samples or embossed samples. This application note aims to demonstrate the use and the efficiency of the ic technique in the measurement of 4 different samples: two curved samples, one sample with large topographic changes and a 20 cent Euro coin.

Introduction

ic-SECM is a relatively recent technique developed at the University of Warwick which allows the topography of a sample to be tracked during an SECM measurement. [1] Using icSECM the probe to sample distance can be maintained over large areas making it useful for not only removing the influence of sample tilt, but also for measuring samples with major topographic features. The M470 allows the user to implement the ic technique in both dcand ac-SECM measurements. This application note aims to demonstrate the use of the ic technique in the measurement of samples with major topographic features. This is demonstrated using four samples: (1) a concave sample, (2) a convex sample, (3) a steel weld, and (4) a 20 cent Euro coin.

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